| 多层薄膜高性能乙醇传感器 |
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| 引用本文： | 管玉国 戴国瑞. 多层薄膜高性能乙醇传感器[J]. 传感器与微系统, 1997, 16(2): 45-47,53 |
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| 作者姓名： | 管玉国 戴国瑞 |
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| 作者单位： | 吉林大学电子工程系!长春，130023 |
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| 摘 要： | 采用PECVD方法，分别注积了SnO2-Fe2O3、SnO2-TiO2-Fe2O3等双层和三层气敏薄膜材料，制成了旁热式传感器。实验结果表明，这种多层结构的元件对乙醇有很高的灵敏度与选择性。
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| 关 键 词： | 气体传感器 多层薄膜 酒敏特性 |
Study of High-Performance Alcohol Sensors of Multilayer Thin Films |
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| Guan Yuguo, Dai Guorui, Nan Jin. Study of High-Performance Alcohol Sensors of Multilayer Thin Films[J]. Transducer and Microsystem Technology, 1997, 16(2): 45-47,53 |
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| Authors: | Guan Yuguo Dai Guorui Nan Jin |
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| Abstract: | Double-layer SnO2-Fe2o3 and triple - layer SnO2 - TiO2 - Fe2O3 thin film materials have been prepared by means of PECVD method and side-heating sensors fabricated. The experimental results show that the sensor has high sensitivity and selectivity to alcohol gas. |
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| Keywords: | Gas transducer Multilayer thin films Alcohol characteristics |
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