基于ZEMAX的半导体激光准直镜设计方法研究

针对目前采用单个球面镜压缩激光时存在发散角效果差或者球面镜片数过多的问题，通过ABCD矩阵法从理论上对高斯光束经过单透镜时的传输特性进行了分析，得出了单透镜无法实现半导体激光光束理想准直的结论。提出了一种基于ZEMAX的半导体光源准直镜的设计方案，并给出了设计与优化方法。结合工程中常用的808nm半导体激光器，设计了双片型808nm半导体激光准直镜，并在ZEMAX中使用合适的优化函数和权重对像差进行了校正。通过采用非球面镜获得了较好的准直效果，发散角达到了0．032mrad。该设计使用的镜片数较少，结构简单。

Research on Semiconductor Collimator Design Based on ZEMAX

When a single spherical mirror is used to compress laser beams, there usually is a problem that the poor divergence can be resulted in or too many spherical lenses have to be used. By using a ABCD matrix method to analyze the Gauss beam passing through a single lens in theory, a conclusion that the beam from a semiconductor laser can not be collimated ideally with a single lens is drew. A design scheme based on ZEMAX is proposed for the collimation of a semiconductor laser source. The design and optimization method is given. For a 808 nm semiconductor laser commonly used in engineering, a collimator with two lenses is designed and its aberration is corrected by using the proper optimization function and weight in ZEMAX. By using a non-spherical surface, fine collimation is implemented at a divergence angle of 0.032 mrad. This design has the features of less lenses and simple structure.