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Silicon Microstructures: Detachment Lithography of Photosensitive Polymers: A Route to Fabricating Three‐Dimensional Structures (Adv. Funct. Mater. 2/2010) |
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| Authors: | Junghoon Yeom Mark A. Shannon |
| Affiliation: | Department of Mechanical Science and Engineering University of Illinois Urbana, IL, 61801 (U.S.A.) |
| Abstract: | |
| Keywords: | Soft lithography Microcontact printing Polymeric materials Detachment lithography |