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Fully Transparent Non‐volatile Memory Thin‐Film Transistors Using an Organic Ferroelectric and Oxide Semiconductor Below 200 °C
Authors:Sung‐Min Yoon  Shinhyuk Yang  Chunwon Byun  Sang‐Hee K Park  Doo‐Hee Cho  Soon‐Won Jung  Oh‐Sang Kwon  Chi‐Sun Hwang
Affiliation:Convergence Components and Materials Research Laboratory Electronics and Telecommunications Research Institute Yuseong‐gu, Daejeon, 305‐700 (Korea)
Abstract:A fully transparent non‐volatile memory thin‐film transistor (T‐MTFT) is demonstrated. The gate stack is composed of organic ferroelectric poly(vinylidene fluoride‐trifluoroethylene) P(VDF‐TrFE)] and oxide semiconducting Al‐Zn‐Sn‐O (AZTO) layers, in which thin Al2O3 is introduced between two layers. All the fabrication processes are performed below 200 °C on the glass substrate. The transmittance of the fabricated device was more than 90% at the wavelength of 550 nm. The memory window obtained in the T‐MTFT was 7.5 V with a gate voltage sweep of ?10 to 10 V, and it was still 1.8 V even with a lower voltage sweep of ?6 to 6 V. The field‐effect mobility, subthreshold swing, on/off ratio, and gate leakage currents were obtained to be 32.2 cm2 V?1 s?1, 0.45 V decade?1, 108, and 10?13 A, respectively. All these characteristics correspond to the best performances among all types of non‐volatile memory transistors reported so far, although the programming speed and retention time should be more improved.
Keywords:ferroelectrics  semiconductors  thin films  transistors
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