Pattern Formation of Silver Nanoparticles in 1‐, 2‐, and 3D Microstructures Fabricated by a Photo‐ and Thermal Reduction Method |
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| Authors: | Jong‐Jin Park Xavier Bulliard Ji Min Lee Jaehyun Hur Kyuhyun Im Jong‐Min Kim Prem Prabhakaran Namchul Cho Kwang‐Sup Lee Sung‐Yong Min Tae‐Woo Lee Son Yong Dong‐Yol Yang |
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| Affiliation: | 1. Samsung Advanced Institute of Technology, Mt.14‐1, Nongseo‐Dong, Giheung‐Gu, Yongin‐Si, Gyeonggi‐Do 446‐712 (Korea);2. Department of Advanced Materials, Hannam University Daejeon 306‐791 (Korea);3. Department of Materials Science and Engineering, Pohang University of Science and Technology San 31 HyojaDong, Nam‐gu, Pohang, Gyeongbuk 790‐784 (Korea);4. Department of Mechanical Engineering, KAIST Daejon 305‐701 (Korea) |
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| Abstract: | One‐, two‐, and three‐dimensional microstructures with dispersed silver nanoparticles are fabricated by a combination of photopatterning and thermal treatment from a silver salt containing photosensitive epoxy resin. Ultraviolet photo‐irradiation and subsequent thermal treatment are combined to control the rate of silver salt reduction, the size and the arrangement of nanoparticles, as well as the reticulation of the epoxy resin. This approach allows the creation of high resolution 1‐, 2‐, and 3D patterns containing silver nanoparticles, with a homogeneous distribution of nanoparticles regardless of the irradiated area. |
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| Keywords: | Microlithography Photoreduction Silver nanoparticles Surface plasmon resonance Thermal reduction Two‐photon lithography |
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