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Developments at SSRF in soft X-ray interference lithography |
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| Authors: | YANG Shu-Min WANG Lian-Sheng ZHAO Jun XUE Chao-Fan LIU Hai-Gang XU Zi-Jian WU Yan-Qing TAI Ren-Zhong |
| Affiliation: | YANG Shu-Min;WANG Lian-Sheng;ZHAO Jun;XUE Chao-Fan;LIU Hai-Gang;XU Zi-Jian;WU Yan-Qing;TAI Ren-Zhong;Shanghai Institute of Applied Physics, Chinese Academy of Sciences,Shanghai Synchrotron Radiation Facility; |
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| 本文献已被 CNKI 等数据库收录！ | |