| 基于Krylov子空间法的MEMS降阶建模与仿真 |
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| 引用本文： | 孙道恒,马海阳,李文望.基于Krylov子空间法的MEMS降阶建模与仿真[J].机械工程学报,2004,40(5):58-61. |
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| 作者姓名： | 孙道恒 马海阳 李文望 |
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| 作者单位： | 厦门大学机电工程系,厦门,361005 |
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| 基金项目： | 国家自然科学基金(50275127) |
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| 摘 要： | 获得系统的宏模型是MEMS系统级建模与仿真的关键。将Krylov子空间理论与方法应用于MEMS降阶建模,介绍了Krylov子空间的理论基础,针对MEMS中常见的静电—结构耦合系统,建立了有限元动力学方程,运用修正Arnoldi算法得到降阶模型。算例表明,经大幅度降阶得到的模型真实地反映了系统地运动状态,大大缩短了求解时间,降低了计算复杂度。
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| 关 键 词： | MEMS 子空间 宏模型 耦合 有限元 |
| 修稿时间： | 2003年7月6日 |
MODEL ORDER REDUCTION AND SIMULATION OF MEMS BASED ON KRYLOV SUBSPACE |
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| Sun Daoheng,Ma Haiyang,Li Wenwang.MODEL ORDER REDUCTION AND SIMULATION OF MEMS BASED ON KRYLOV SUBSPACE[J].Chinese Journal of Mechanical Engineering,2004,40(5):58-61. |
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| Authors: | Sun Daoheng Ma Haiyang Li Wenwang |
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| Affiliation: | Sun Daoheng,Ma Haiyang,Li Wenwang Department of Mechanical & Electrical Engineering,Xiamen University,Xiamen 310065 |
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| Abstract: | Obtaining the macro model of MEMS is the key of
MEMS system-level modeling and simulation. The Krylov
subspace theory and method are applied to get reduced order
model of MEMS, and the theoretical foundation of Krylov
subspace is introduced. For the common MEMS coupling with
static-electrical and structure, the FEM functions are built, and
its reduced order model can be obtained by using modified
Arnoldi algorithm. It's shown from example that the reduced
order model describes really the dynamics of the original
system, while the computing time and complexity are reduced
to a great extent. |
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| Keywords: | MEMS Subspace Macro model Coupled FEM |
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