Magnetic properties of evaporated CoCr films

Perpendicular magnetic CoCr films were prepared on glass substrates using electron beam evaporation. The magnetic properties depend strongly on the substrate temperature, Ts. The anisotropy field,H_{k}^{eff}, and the perpendicular coercivity, Hc(perp) show maximum values at Tsaround 250°C. In this case, the alignment of c-axis is optimal and the grain size is smallest. The lattice spacing of the c-planes increases wlth Tsuntil 300°C. When the films prepared below 200°C were annealed around 300°C in high vacuum, the saturation magnetization, Ms, increased. The value of Ms, however, decrease by annealing above 400°C. In spite of the decrease of Msdue to the annealing above 400°C,H_{k}^{eff}and Hc(perp) increase by annealing above 400°C. If the films were bombarded by argon ions during film growth, Msdecreased and the internal stress changed from tensile to compressive. For low substrate temperature (below 150°C),H_{k}^{eff}decreased due to ion bombardment.