Miniature hermetically sealed housing for pressure sensors

The aim of the current study was to reduce both the size as well as production costs of current designs whilst retaining the general architectural principles and find a solution lending itself to batch processing. The designs result in a new method for connecting the sensor to the outside being necessary. This can be achieved by thin film on a steel substrate or using ceramic technology such as LTCC. Special attention is paid to the flexible membranes. Small membranes with high corrugations made of nickel are separated in a standard galvanic process on the housing. The manufactured sensors are characterised.