| 超精密微调架的设计 |
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| 引用本文： | 刘武,王世英.超精密微调架的设计[J].光通信技术,1990(4). |
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| 作者姓名： | 刘武 王世英 |
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| 作者单位： | 桂林激光通信研究所
(刘武)，桂林激光通信研究所(王世英) |
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| 摘 要： | 本文介绍了一种由机械粗调和压电微调组合而成的复合型超精密微调架,并着重介绍了由电致伸缩陶瓷微位移器和柔性铰链或簧片组合成亚微米级精度微调机构的设计。
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| 关 键 词： | 电致伸缩陶瓷微位移器 柔性铰链 超精密微调架 |
The Design of Superaccurate Micropositioning Stage |
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| Liu Wu Wang Shiying.The Design of Superaccurate Micropositioning Stage[J].Optical Communication Technology,1990(4). |
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| Authors: | Liu Wu Wang Shiying |
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| Affiliation: | Guilin Institute of Optical Communications |
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| Abstract: | This paper instroduced a superaccurate micropositioning stagewhich consists of a coarse-positioner and a micro-positioner. It is descri-bed emphatically a design method of the piezoelectric micropositioningstage which is combined by an electrostrictive ceramic micropositioner and aflexure hinge or a plate spring with the submicron position accuracy. |
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| Keywords: | Electrostrictive ceramic micropositioner Flexure hinge Superaccurate micropositioning stage |
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