影响集成电感性能的关键因素

片上集成电感是单片集成射频电路、微波电路及光电集成电路中不可缺少的重要元件。高Q值的片上集成电感是IC工作者追求的目标。衬底损耗和金属损耗一直被认为是限制集成电感品质的主要因素,文中实例为证，在尽量消除衬底损耗和减小金属损耗条件下。得出它们并不是片上集成电感的决定性限制因素。本文从电感的定义出发，得出电感螺旋线之间磁通量的相互抵消是集成电感不能获得高Q值的决定因素。并通过螺旋电感的模拟计算和结合已有的实验，对此论点进行了论证。

Dominant Limit of Spiral Inductors

High-Q inductors integrated on IC circuits have been an elusive goal for years in RF and microwave fields. Substrate losses and metal losses were commonly recognized for the main reasons for low quality of the spiral inductors. Based on prior experiments, substrate losses and metal losses were minished to minimum, but the low Q problem still exists. From the definition of the inductors, it was presented that the cancellation of magnetic flux between the spiral lines is the primary reason for low quality of the spiral inductors in place of the substrate losses and metal losses. Simulations and experiments are raised to support this opinion and reasonable alternatives were presented too.