大规模半导体器件厂房通风空调节能分析

分析了大规模半导体器件生产厂房通风空调系统的特点,并以某工程为例,说明该类厂房能耗大的现状,从设计计算和运行管理的角度分析了造成这一不合理现状的原因,指出该类厂房应采用变频技术,按照生产 和非生产工况,对送风量、排风量和新风量进行调节、控制,达到节能的目的。

Ventilation and air conditioning energy analysis of a large-scale integrated circuit workshop

Analyses the characteristic of the ventilating and air conditioning system. Illustrates from aspects of design and operation that the energy consumed in this kind workshop is higher with an example project. Points out that the frequency control technology should be employed to regulate the volume of supply air, exhaust air and fresh air for higher energy effciency.