微细电解铣槽加工参数对微槽加工精度的影响

采用微细电解加工方法在3J21合金横梁上进行微槽的铣削加工,主要研究了脉冲幅值、脉冲频率、脉冲宽度等加工参数对微槽的侧壁间隙波动误差、底部间隙波动误差、侧壁角度、底部圆角尺寸的影响规律。通过优化加工参数,可将微槽的宽度误差和槽底厚度误差控制在3μm以内,侧壁角度在90~96°之间,底部圆角半径小于17μm。

Influence of Process Parameters on Machining Accuracy of Micro Groove by Micro Electrochemical Machining

This paper is to study the influence of machining parameters of micro electrochemical machining on the machining accuracy of micro grooves in elastic material 3J21 alloy. The effects of process parameters such as pulse amplitude ,pulse frequency and pulse width on the accuracy of groove width and bottom thickness,angle of sidewall and bottom fillet radius were investigated by extensive experiments. Using selected optimal machining parameters ,the errors of groove width and bottom remaining thickness were controlled within 3 μm. The taper of side wall between 90~96° ,and the bottom fillet radius less than 17μm were achieved.