| 磁镜场对PCVD制备SnO2导电薄膜的影响 |
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| 引用本文： | 刘艳红 刘祖黎. 磁镜场对PCVD制备SnO2导电薄膜的影响[J]. 传感技术学报, 1997, 10(4): 15-19 |
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| 作者姓名： | 刘艳红 刘祖黎 |
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| 作者单位： | 华中理工大学物理系!武汉430074硕士生(刘艳红)，华中理工大学物理系!武汉430074 教授(刘祖黎) |
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| 摘 要： | 本文利用自制的磁常研究了不同磁镜场对等离子体化学气相沉积技术制备的ＳｎＯ２导电薄膜电学性能的影响。
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| 关 键 词： | 导电薄膜 增镜场 PCVCD 二氧化锡 |
The Effect of Magnetic Mirror Field on Preparation of SnO_2 Film by PCVD |
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| Liu Yanhong Liu Zuli. The Effect of Magnetic Mirror Field on Preparation of SnO_2 Film by PCVD[J]. Journal of Transduction Technology, 1997, 10(4): 15-19 |
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| Authors: | Liu Yanhong Liu Zuli |
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| Affiliation: | Dept. of Physics. Huazhong University of Technology. Wuhan.430074 |
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| Abstract: | The effect of magnetic mirror field made by authors on SnO2 film prepared by plasma chemical vapor deposition(PCVD) was studied. Experimental results show that the sheet resistance of SnO2 film becomes low and its uniformity becomes high, when the ration of applied magnetic mirror is 4. 3. More over, it is possible to decrease the depositing temperature and the current of the power supply. All experimental results are analyzed and discussed. |
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| Keywords: | SnO2 electrical film magnetic mirror field PCVD |
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