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2000:薄膜与真空器件
引用本文:华中一. 2000:薄膜与真空器件[J]. 真空科学与技术学报, 1994, 0(3)
作者姓名:华中一
作者单位:复旦大学真空物理研究室!上海200433
摘    要:回顾了真空电子器件二十年来的发展,并对今后七年薄膜与真空器件研究和生产的若干趋势作了扼要的叙述。在电子束管方面,高清晰度显象管、扁平显示管、飞点管、高分辨率、等离子体监视屏等仍将继续发展并占有重要的地位。在薄膜方面,硬膜、超导膜和亚稳态薄膜的研究将仍然是真空科学方面的热点。真空微电子器件面临的抉择则在于能否得到新构思的支撑。最后对本学科总体的一些问题提出了看法。

关 键 词:薄膜  真空器件  电子束管  真空微电子学

2000:THIN FILM AND VACUUM DEVICES
Hua Zhongyi. 2000:THIN FILM AND VACUUM DEVICES[J]. JOurnal of Vacuum Science and Technology, 1994, 0(3)
Authors:Hua Zhongyi
Abstract:The development of vacuum electronic devices was reviewed,and a vista of thin film and vacuum devices for the year of 2000 was prospected. In the category of display devices, HDTV picture tube,flat CRT, flying-spot tube and high-reso1ution AC plasma monitors will be still very important and will have many improvernents. For the thin films,hard coatings,superconductive and metastable films will be the hot-spots. The development of vacuum rnicroelectronics depends upon whether the new idea exists.Some problems and technical policy in this field were also discussed.
Keywords:Thin film   Vacuum devices   Cathode-ray tubes   Vacuum microelectronics
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