| 热传导在激光再结晶中的作用 |
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| 引用本文： | 王红卫,杨景铭.热传导在激光再结晶中的作用[J].微电子学与计算机,1995,12(2):46-47. |
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| 作者姓名： | 王红卫 杨景铭 |
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| 作者单位： | 清华大学微电子学研究所 |
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| 摘 要： | 本文借助于计算机模拟，定性分析了热传导对于形成反射条结构激光再结晶过程中温度双峰分布的重要作用。结果表明，影响再结晶质量的激光功率、高反区条宽以及反射率差等因素是通过热传导过程相互制约的。
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| 关 键 词： | SOI 硅 激光再结晶 热传导 |
The Role of Thermal Diffusion in Laser Recrystallization |
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| Wang HOngwei,Yang Jingming, Luan Hongfa, Qian Peixin.The Role of Thermal Diffusion in Laser Recrystallization[J].Microelectronics & Computer,1995,12(2):46-47. |
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| Authors: | Wang HOngwei Yang Jingming Luan Hongfa Qian Peixin |
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| Abstract: | By using computer modeling, this paper qualitively indicated the imPOrtant role of thermal diffusion in forming two-peak distribution of temperature in laser recrystallization with renective-stripe structure. The results showed that it was through the process of thermal diffusion that the factors such as laser power,high-renective-stripe width and renectivity difference conditioned each other in affecting the recrystallizating quality. |
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| Keywords: | Laser recrystallization Thermal diffusion Computer modeling |
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