Photonic integrated circuits fabricated using ion implantation |
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| Authors: | Charbonneau S Koteles ES Poole PJ He JJ Aers GC Haysom J Buchanan M Feng Y Delage A Yang F Davies M Goldberg RD Piva PG Mitchell IV |
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| Affiliation: | Inst. for Microstruct. Sci., Nat. Res. Council of Canada, Ottawa, Ont.; |
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| Abstract: | Intermixing the wells and barriers of quantum-well (QW) laser heterostructures generally results in an increase in the bandgap energy and is accompanied by changes in the refractive index. A technique, based on ion implantation-induced QW intermixing, has been developed to enhance the quantum-well intermixing (QWI) rate in selected areas of a wafer. Such processes offer the prospect of a powerful and simple fabrication route for the integration of discrete optoelectronic devices and for forming photonic integrated circuits |
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