Fabrication of ball-shaped atomic force microscope tips by ion-beam-induced deposition of platinum on multiwall carbon nanotubes |
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| Authors: | Yung Ho Kahng Jinho Choi Kwanghoon Jeong Byong Chon Park Dal-Hyun Kim Joon Lyou Jae-Joon Lee Haiwon Lee Takhee Lee Sang Jung Ahn |
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| Affiliation: | 1. Korea Research Institute of Standards and Science, Daejeon 305-340, Republic of Korea;2. Department of Electrical Engineering, Chungnam National University, Daejeon 305-764, Republic of Korea;3. Department of Applied Chemistry & Department of Advanced Technology Fusion, Konkuk University, Chungju 380-701, Republic of Korea;4. Department of Chemistry, Hanyang University, Seoul 133-791, Republic of Korea;5. Department of Materials Science and Engineering, Gwangju Institute of Science and Technology, Gwangju 500-712, Republic of Korea |
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| Abstract: | Ball-shaped atomic force microscope (AFM) tips (ball tips) are useful in AFM metrology, particularly in critical dimension AFM metrology and in micro-tribology. However, a systematic fabrication method for nano-scale ball tips has not been reported. We report that nano-scale ball tips can be fabricated by ion-beam-induced deposition (IBID) of Pt at the free end of multiwall carbon nanotubes that are attached to AFM tips. Scanning electron microscopy and transmission electron microscopy analyses were done on the Pt ball tips produced by IBID in this manner, using ranges of Ga ion beam conditions. The Pt ball tips produced consisted of aggregated Pt nano-particles and were found to be strong enough for AFM imaging. |
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| Keywords: | Carbon nanotube tip Atomic force microscopy Focused ion beam |
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