Raman spectroscopy study of the phase transformation on nanocrystalline titania films prepared via metal organic vapour deposition |
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| Authors: | C A Chen Y S Huang W H Chung D S Tsai and K K Tiong |
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| Affiliation: | (1) Department of Electronic Engineering, National Taiwan University of Science and Technology, 43 Keelung Road, Section 4, Taipei, 106, Taiwan;(2) Department of Chemical Engineering, National Taiwan University of Science and Technology, Taipei, 106, Taiwan;(3) Department of Electrical Engineering, National Taiwan Ocean University, Keelung, 202, Taiwan; |
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| Abstract: | Raman spectroscopy (RS) was used to study the phase transformations of nanocrytalline TiO2 thin films. The films were grown by a vertical-flow cold-wall metal organic chemical vapour deposition system, using Ti(C10H14O5) as the source reagent, at different substrate temperatures. The results indicate that the anatase phase is present at around
550 °C and the rutile phase starts to form at 620 °C. The anatase phase completely transforms into the rutile phase at 680 °C.
We have demonstrated that RS can be used as a powerful nondestructive technique for a quick and efficient determination of
the phase of TiO2 thin films. |
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