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Depth-profiled characterization of complex refractive index of ion implanted optically transparent polymers using multilayer calculations and reflectance data |
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| Authors: | Hristiyan Y. StoyanovIvan L. Stefanov Gichka G. TsutsumanovaStoyan C. Russev Georgi B. Hadjichristov |
| Affiliation: | a Department of Quantum Electronics, Faculty of Physics, Sofia University, 5 James Bourchier Blvd., BG-1164 Sofia, Bulgaria b Department of Solid State Physics and Microelectronics, Faculty of Physics, Sofia University, 5 James Bourchier Blvd, BG-1164 Sofia, Bulgaria c Laboratory of Optics and Spectroscopy, Georgi Nadjakov Institute of Solid State Physics, Bulgarian Academy of Sciences, 72 Tzarigradsko Chaussee Blvd., BG-1784 Sofia, Bulgaria |
| Abstract: | The material in the ion-modified surface layer formed in polymethylmethacrylate (PMMA) is optically characterized by calculations based on multilayer model and optical reflectance data. PMMA was subjected to a low energy (50 keV) silicon ion implantation at the fluences of 3.2 × 1015 cm−2 and 3.2 × 1016 cm−2. Both real and imaginary components of the complex refractive index of this optically transparent polymer are modeled in a geometry that includes a gradient of their in-depth spatial distribution. |
| Keywords: | Ion implanted polymers Polymethylmethacrylate (PMMA) Optical characterization Refractive index depth profile Materials science |
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