纳米ZnO基掺杂气敏元件阵列的制备与特性

以金属蒸气氧化法制备的纯纳米ZnO为气敏原料,通过丝网印刷技术在Al2O3基片上制得纯ZnO和掺杂ZnO的气敏元件阵列。结果表明,元件阵列具有低的功耗,纯ZnO气敏元件阵列在350~400℃对橙汁、可乐、酒精和汽油有较高的敏感性,灵敏度分别为2.9,2.9,53.5和43.4。通过Bi2O3+Cu2O的掺杂,可以降低纯ZnO的电导,并进一步提高气敏元件在250~350℃温度区间对汽油的敏感性。并对其气敏机理进行了探讨。

Preparation and properties of doped nanometer ZnO gas sensor array

Pure ZnO nanoparticles were produced by metallic vapour oxidation method.Based on this raw material and it’s dopant,gas sensor array was fabricated onto Al2O3 ceramic substrate through screen-printing technique.The results show that gas sensor array has low-power,the gas sensor array of pure ZnO exhibited higher sensitivity to orange juice,cola,alcohol and gasoline at 350~400 ℃,the resistance sensitivities are as follows: 2.9,2.9,53.5 and 43.4.The conductivity of pure ZnO could be decreased by doping of Bi2O3+Cu2O.The sensitivity of the doping sample is higher than that of pure ZnO sample at 250~350 ℃,which indicate that gas sensor array has certain selectivity to gasoline.The gas sensitivity mechanism of doping was also discussed.