Humidity sensing properties of La~(3+)/Ce~(3+)-doped TiO_2-20 wt.% SnO_2 thin films derived from sol-gel method |
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Authors: | LI Hongxia SHI Zhiming LIU Hongwei |
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Affiliation: | [1]School of Materials Science and Engineering [2]Inner Mongolia University of Technology [3]Inner Mongolia Research Center of Advanced Materials Engineering & Technology |
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Abstract: | The humidity sensing properties of La3+/Ce3+-doped TiO2-20 wt.%SnO2 thin films were studied. Sol-gel method was employed to prepare the films on alumina substrates. By constructing a humidity-impedance measuring system, the sensing behaviors were inspected for the films sintered at different temperatures. Experimental results showed that, 0.5 wt.% of La2O3 or Ce2O3 doped films sintered at 500 °C for 2 h had the best humidity sensing properties, the impedance decreasing from 109 Ω to below 104 Ω in the humidity range of 15–95 RH%. Moreover, Ce3+-doping had better humidity sensing properties than La3+-doping. The doping mechanism was discussed in terms of phase composition, granularity of crystalline and segregation of rare earth ions at grain boundaries. |
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Keywords: | humidity sensing titania thin film rare earths |
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