超精密磁流变复合抛光技术研究进展

对超精密磁流变复合抛光技术的国内外研究进展进行了评述，介绍了当前主要应用的几种超精密磁流变复合抛光技术的加工原理和发展现状.重点介绍了磁流变射流复合抛光、超声波磁流变复合抛光、化学机械磁流变复合抛光以及集群磁流变复合抛光的加工技术内涵，从加工效率、加工表面均匀性、加工精度、加工适合的材料与形状等方面对上述几类超精密磁流变复合抛光方法进行比较和评述.最后对超光滑无损伤超精密磁流变抛光技术的发展方向进行了预测.

A Review on Ultra-precision Compound Polishing Technology ofMagnetorheological

Research on magnetorheological finishing technology at home and abroad is reviewed. According to the development of magnetorheological finishing technology, the current main application of ultra-precision machining principle and progress of magnetorheological compound polishing technology are elaborated, mainly focusing on Magnetorheological Jet Polishing, Ultrasonic-magnetorheological Compound Polishing, Chemo-mechanical Magnetorheological Finishing and Cluster of MRF processing methods and mechanism of material removal. Then the MRF method is compared in terms of surface precision machining, surface integrity and processing efficiency. Finally, a discussion is conducted on how to improve the precision polishing efficiency, forecasting the development of ultra-precision magnetorheological finishing and pointing out the key research direction in the future.