注入氮离子的SiC涂层阻氢性能研究

利用离子束混合－离子注入（Ar^ ）和磁控溅射相结合的实验技术在HR－1不锈钢基体上制备了注入N^ 的SiC涂层，并用表面分析手段对所制备涂层的表面形貌，剖面形貌、相结构，表面成分，表面元素的化学态进行了分析，结果表明：制备的涂层结构致密，表面平整、膜层成分均匀；涂层与基体之间形成了一明显的过渡层，增强了涂层和基体之间的结合力，用二次离子质谱（SIMS）对充氘涂层的阻氢性能进行了定性分析，结果表明，涂层元素与氢形成稳定的化学键，抑制了氢的扩散和迁移，使得涂层具有一定的阻氢能力。

Hydrogen Resistance Property of Surface N+ Implanting SiC Coating

N\++ implanting SiC coating was prepared on HR\|1 stainless steel by ion beam mixing (IBM) known as ion implantation (Ar\++) followed by magnetron sputtering. The coating surface and cross\|section morphologies, phase structures, composition and elements were all analyzed by various surface analysis methods. Results indicated that the coatings were uniformity and smooth and compact, and there existed a mixed transition layer between films and matrix that enhanced the adhesion of coating and matrix. Deuterium\|implanting coating was analyzed by SIMS. Results showed that the coating had hydrogen\|resistance because there built stable chemical bond between coating elements and hydrogen so as to retard diffusion and transference of hydrogen.