精密设备系统主动隔振的基础理论与技术

本文分析了精密设备隔振平台的激励环境,从理论分析角度将被动隔振和主动隔振的隔振传递率进行了对比,得出在超低频阶段主动隔振传递率远远低于被动隔振中的隔振传递率的结论.从应用技术角度阐述了精密隔振中广泛应用的超磁致伸缩驱动器的性能,并通过实验测得了其静态位移输出特性.此外,介绍了主动隔振系统常用的控制方法,给出了模糊PID方法的振动控制效果.

BASIC THEORY AND TECHNOLOGY IN THE ACTIVE VIBRATION ISOLATION OF PRECISION DEVICES

Sources of environment of the precise excitation calling for the use of precision vibration isolation platforms were analyzed, and the 2 basic measures of passive vibration isolation and active vibration isolation compared. Based on the discussion, a conclusion is arrived at that active vibration isolation is effective in the range of ultralow frequency, while passive vibration isolation have its role in the higher frequency range. For wide applications in active vibration isolation, structures and characteristics of giant magnetostrictive actuators were given. Test results demonstrate that such actuators have perfect stable-state characteristics in their displacement output linearity. Some vibrational active control methods that are generally used in active isolation systems were introduced, and the results of three vibration isolation methods(passive control, PID control and fuzzy-PID) were compared.