Analysis of coatings and thin films using energetic ions

Energetic ion analysis techniques provide non-destructive information on the depth distribution of atomic composition in the near-surface (1–10 μm) region of a solid sample. The techniques are quantitative and are not complicated by the presence of chemical or matrix effects. Generalized nuclear reaction analysis is described and its application to the measurement of the stoichiometry of Ta₂O₅ films and BeO coatings on Cu-Be is briefly discussed.