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Authors:N Miyata  K Miyake  S Nao
Affiliation:1. Faculty of Engineering, Yamaguchi University, Ube Japan
Abstract:Transparent conducting films of cadmium-tin oxide were prepared by d.c. reactive sputtering from a CdSn alloy target in an ArO2 atmosphere. The electrical and optical properties of the films were found to depend on the oxygen concentration in the gas mixture. The lowest resistivity obtained was 4 × 10?4 Ω cm and the average optical transmission was 90% over the visible region. The structure of the films was examined by X-ray diffraction. The thick films exhibited CdSnO3 (200) or Cd2SnO4 (001) and (130) peaks but most of the thin films were amorphous. The post-deposition annealing of the films in an argon atmosphere affected their electrical and optical properties.
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