Thanks to our referees |
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| Authors: | SF Meyer EJ Hsieh |
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| Affiliation: | Lawrence Livermore Laboratory, University of California, Livermore, Calif. 94550 U.S.A. |
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| Abstract: | We successfully developed a new process for making strong smooth thick SiO2 films on hemispherical Kovar mandrels of various sizes designed for multishell laser fusion targets. The surface finish obtainable with a SiO2 coating 13 μm thick on a mandrel 260 μm in diameter is approximately 30 nm peak to peak, with a few defects approximately 0.3 μm deep. The r.f. magnetron sputtered SiO2 films were dense and crystalline. |
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