| 特种微型机械加工技术 |
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| 引用本文： | 李勇,郭旻,周兆英. 特种微型机械加工技术[J]. 光学精密工程, 2000, 8(3): 287-291 |
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| 作者姓名： | 李勇 郭旻 周兆英 |
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| 作者单位： | 清华大学精密仪器与机械学系，北京 100084 |
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| 摘 要： | 综述微型机电系统/微型机械的三维形状加工及极限尺寸加工的研究开发现状.相对硅微细加工和LIGA工艺,不采用掩膜版的特种微细加工技术,如微细激光成型、微细电火花加工以及微细机械加工等近年来取得较大进展,在三维微小机械结构成型上有独到优势;同时扫描隧道显微加工技术的开发将微型机械向极限尺寸领域推进.微型机电系统/微型机械的长足发展有赖于融合已有先进技术和交叉学科思想的微型机械加工技术的进一步研究开发.
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| 关 键 词： | 微型机电系统 微型机械 微细加工 微细激光成型 微细电火花加工 扫描探针显微加工 |
| 文章编号： | 1004-924X(2000)03-0287-05 |
| 收稿时间： | 2000-01-13 |
| 修稿时间： | 2000-01-13 |
Overview of non-traditional micromachining technologies |
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| LI Yong,GUO Min,ZHOU Zhao-ying. Overview of non-traditional micromachining technologies[J]. Optics and Precision Engineering, 2000, 8(3): 287-291 |
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| Authors: | LI Yong GUO Min ZHOU Zhao-ying |
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| Affiliation: | Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084, China |
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| Abstract: | The research activities on non-traditional micromachining technologies to shape microstructures with 3 DOF and to make microstructures with ultimate size are summarized in this paper. Compared with silicon process and LIGA process, the non-traditional micromachining technologies without mask such as stereolithography, micro EDM and micro mechanical machining have got great progress in recent years, which have advantages especially in shaping microstructures with 3 DOF. At the same time, SPM processing technology accelerates miniaturization to ultimate size area. The research and development of micromachining technologies by integrating multidisciplinary novel ideas and advanced technologies will give the possibility for getting much further progress in MEMS/micromachines. |
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| Keywords: | MEMS micromachine micromachining stereolithography micro EDM SPM processing |
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