基于CO2激光单点加热的微泡腔制备及其性能研究

为了简化微泡腔的制备工艺,在传统CO_2激光双向加热方案的基础上,采用CO_2激光单点加热毛细管。通过精确控制加热温度和气体流速,制备出半球形的微泡腔,进而通过调节激光光斑,增加加热面积的方式制备出球形的微泡腔。使用光学显微镜和原子力显微镜(AFM)对制备的球形微泡腔进行表征,并通过COMSOL仿真验证了所制备微泡腔的性能。所制备的微泡腔表面光滑,壁厚最薄处可达到亚微米量级。研究结果表明,通过CO_2激光单点加热制备的微泡腔的壁厚存在轻微的不均匀性,但其谐振Q值仍然较高,可广泛应用于传感领域。

Research on fabrication and properties of microbubbles based on CO2 laser single-spot heating

In order to simplify the fabrication of microbubble, $ \text{C}{\text{O}}_{\text{2}} $ laser single-spot heating microcapillary is built on the basis of traditional $ \text{C}{\text{O}}_{\text{2}} $ laser bidirectional heating structure. By precise control of heating temperature and gas flow rate, a hemispherical microbubble cavity is fabricated. The spherical microbubble cavity is achieved through adjusting the laser spot diameter to increase the heating area. The spherical microbubbles are characterized by optical microscopy and atomic force microscopy (AFM), and their properties are verified by COMSOL simulation. The surfaces of the spherical microbubbles are very smooth and their wall thickness minimum can reach submicron degree. The result shows that although the wall thickness of the microbubble cavity prepared by single-spot heating is slightly uneven, its resonant quality factor is still high. Therefore, the microbubble cavity can be widely used in the sensing field.