| 陶瓷靶射频磁控溅射TiO2薄膜的制备和光催化特性 |
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| 引用本文： | 桑敏,刘发民,丁芃,毋二省,王天民.陶瓷靶射频磁控溅射TiO2薄膜的制备和光催化特性[J].功能材料,2005,36(7):1126-1130. |
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| 作者姓名： | 桑敏 刘发民 丁芃 毋二省 王天民 |
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| 作者单位： | 北京航空航天大学,理学院凝聚态物理与材料物理研究中心,北京,100083;北京航空航天大学,理学院凝聚态物理与材料物理研究中心,北京,100083;北京航空航天大学,理学院凝聚态物理与材料物理研究中心,北京,100083;北京航空航天大学,理学院凝聚态物理与材料物理研究中心,北京,100083;北京航空航天大学,理学院凝聚态物理与材料物理研究中心,北京,100083 |
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| 基金项目： | The Aeronautics Science Foundation (03 G51069) |
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| 摘 要： | Transparent titania thin films were prepared on glass substrates by radio frequency magnetron sputtering from TiO2 ceramic target. The structure and morphology of those films with different sputtering power and substrate temperature has been measured with X-ray diffractometer (XRD) and atomic force microscope (AFM). It was found that the films were anatase and a mix of anatase-rutile with different condition. The transmission of the films has been studied by using UV-VIS-NIR spectrometer. It shows absorption edge has a little red shift with the increase of sputtering power and substrate temperature. The photocatalytic activity of the films was tested on the degradation of Rhodamine B solution. T.he highest degradation efficiency in our experiment was obtained in the film deposited at 550℃ and 130W.
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| 关 键 词： | TiO2薄膜 射频磁控溅射 陶瓷靶 光催化特性 |
| 文章编号： | 1001-9731(2005)07-1126-05 |
| 修稿时间： | 2004年12月4日 |
Photocatalytic properties of titania thin films by radio frequency magnetron sputtering from ceramic target |
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| SANG Min,LIU Fa-min,DING Peng,WU Er-xing,WANG Tian-min.Photocatalytic properties of titania thin films by radio frequency magnetron sputtering from ceramic target[J].Journal of Functional Materials,2005,36(7):1126-1130. |
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| Authors: | SANG Min LIU Fa-min DING Peng WU Er-xing WANG Tian-min |
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| Abstract: | Transparent titania thin films were prepared on glass substrates by radio frequency magnetron sputtering from TiO2 ceramic target. The structure and morphology of those films with different sputtering power and substrate temperature has been measured with X-ray diffractometer (XRD) and atomic force microscope (AFM). It was found that the films were anatase and a mix of anatase-rutile with different condition. The transmission of the films has been studied by using UV-VIS-NIR spectrometer. It shows absorption edge has a little red shift with the increase of sputtering power and substrate temperature. The photocatalytic activity of the films was tested on the degradation of Rhodamine B solution. The highest degradation efficiency in our experiment was obtained in the film deposited at 550℃ and 130W. |
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| Keywords: | titania thin films RF magnetron sputtering ceramic target photocatalytic activity |
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