| 压阻式压力传感器零点输出研究 |
| |
| 引用本文： | 李晶晶,岳瑞峰,刘理天.压阻式压力传感器零点输出研究[J].传感器与微系统,2002,21(7):9-11. |
| |
| 作者姓名： | 李晶晶 岳瑞峰 刘理天 |
| |
| 作者单位： | 清华大学,微电子所,北京,100084 |
| |
| 摘 要： | 使用有限元方法 ,分析了压力传感器力敏电阻条工作时的自身发热对传感器零点输出的影响 ,结果表明 :由于电阻工作时的发热引起传感器温度分布的不均匀 ,即便组成压力传感器电桥的力敏电阻条参数完全匹配 ,传感器也可能存在零点输出。
|
| 关 键 词： | 压力传感器 压阻效应 零点输出 硅 |
| 文章编号： | 1000-9787(2002)07-0009-03 |
Research of the zero point output of piezoresistive pressure sensor |
| |
| LI Jing-jing,YUE Rui-feng,LIU Li-tian.Research of the zero point output of piezoresistive pressure sensor[J].Transducer and Microsystem Technology,2002,21(7):9-11. |
| |
| Authors: | LI Jing-jing YUE Rui-feng LIU Li-tian |
| |
| Abstract: | Using FEM (finite element method),the influence of the heat generated by the working piezoresistor of a pressure sensor to the zero point output of the sensor is analyzed,and the result shows:because of the uneven temperature distribution caused by the heat of piezoresistor's work,there is a offset of the output of the bridge even though the electronic parameters of the bridge's resisters are fully matched to each other. |
| |
| Keywords: | pressure sensor piezoresistivity zero point output silicon |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
|
