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| DLC薄膜的表面形貌及其摩擦学性能研究 | |
| 引用本文： | 白秀琴,李健,严新平. DLC薄膜的表面形貌及其摩擦学性能研究[J]. 润滑与密封, 2005, 0(4): 19-21 |
| 作者姓名： | 白秀琴 李健 严新平 |
| 作者单位： | 1. 武汉理工大学可靠性工程研究所,湖北,武汉,430063;武汉材料保护研究所,湖北,武汉,430030 2. 武汉材料保护研究所,湖北,武汉,430030 3. 武汉理工大学可靠性工程研究所,湖北,武汉,430063 |
| 基金项目： | 国家自然科学基金项目资助(50175041). |
| 摘 要： | 以真空蒸发碳离子束辅助镀膜法制备了DLC薄膜，通过原子力显微镜(AFM)和扫描电子显微镜(SEM)观察了该薄膜的表面形貌，对该薄膜的表面形貌对其摩擦学行为的影响进行了研究。研究发现：用真空蒸发碳离子束辅助镀膜的方法制备的类金刚石薄膜表面光滑，颗粒均匀，粒度小，摩擦因数降低；DLC薄膜比弹簧钢片及Ti6Al4V球基体耐磨；DLC薄膜的摩擦学性能在摩擦过程中会进一步改善。 |
| 关 键 词： | DLC薄膜 真空蒸发离子束辅助镀膜 表面形貌 摩擦学性能 |
| 文章编号： | 0254-0150(2005)4-019-3 |
| 修稿时间： | 2005-01-12 |
Study on the Surface Topography and Tribological Properties of DLC Films |
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| Bai Xiuqin,Li Jian,Yan Xinping. Study on the Surface Topography and Tribological Properties of DLC Films[J]. Lubrication Engineering, 2005, 0(4): 19-21 | |
| Authors: | Bai Xiuqin Li Jian Yan Xinping |
| Affiliation: | Bai Xiuqin 1,2 Li Jian 2 Yan Xinping 1 |
| Abstract: | DLC films was prepared by C + ion beam and vapor deposition,their surface topography was observed through AFM and SEM,and the influence of their surface topography on their tribological behavior was examined.It is found DLC films prepared by C + ion beam and vapor deposition have a fine surface with small and even grains,the friction experiment indicates certain reduction in friction coefficient,DLC films are more friction-resistant than CK101 and Ti6Al4V,and the tribological properties of DLC films can be improved in the process of friction. |
| Keywords: | DLC film C + ion beam and vapor deposition surface topography tribological properties |
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