| Ba0.7Sr0.3TiO3薄膜的制备、结构及性能研究 |
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| 引用本文： | 叶扬,丁爱丽,唐新桂,罗维根.Ba0.7Sr0.3TiO3薄膜的制备、结构及性能研究[J].无机材料学报,2002,17(1):125. |
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| 作者姓名： | 叶扬 丁爱丽 唐新桂 罗维根 |
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| 作者单位： | 中国科学院上海硅酸盐研究所无机功能材料开放实验室 上海 200050 |
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| 基金项目： | 国家自然科学基金，国家高技术研究发展计划(863计划) |
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| 摘 要： | 研究了一种以乙二醇为稳定剂的新的ＢＳＴ前驱液，用ｓｏｌ－ｇｅｌ法在Ｐｔ／Ｔｉ／ＳｉＯ２／Ｓｉ（１００）基底上成功地制备出具有优良电学性能的Ｂａ０．７Ｓｒ０．３ ＴｉＯ３薄膜．乙二醇的加入有效地增加了前驱液的稳定性，并降低薄膜的结晶温度．利用ＸＲＤ、ＤＴＡ等技术分析了凝胶热处理过程中相变化情况及薄膜厚度与成相的关系．厚度 ２００ｎｍ，Ｏ２气氛中 ７００℃处理 １５ｍｉｎ后的 ＢＳＴ薄膜具有良好的介电性能，１００ｋＨｚ时介电常数ε＞４００，介电损耗 Ｄ＜０．０２；Ｐ—Ｅ电滞回线说明薄膜具有良好的铁电性能，剩余极化只约为１．４μＣ／ｃｍ２，矫顽场强 Ｅｃ约为 ４８ｋＶ／ｃｍ．
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| 关 键 词： | BST薄膜 溶胶-凝胶法 乙二醇 P—E电滞回线 |
| 收稿时间： | 2001-01-12 |
| 修稿时间： | 2001-01-18 |
Preparation, Structure and Properties of Ba0.7Sr0.3TiO3 Thin Films |
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| YE Yang,DING Ai-Li,TANG Xin-Gui,LUO Wei-Gen.Preparation, Structure and Properties of Ba0.7Sr0.3TiO3 Thin Films[J].Journal of Inorganic Materials,2002,17(1):125. |
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| Authors: | YE Yang DING Ai-Li TANG Xin-Gui LUO Wei-Gen |
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| Affiliation: | Laboratory of Functional Inorganic Materials; Shanghai Institute of Ceramics; Chinese Academy of Sciences; Shanghai 200050; China |
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| Abstract: | Barium strontium titanate，Ba0.7Sr0.3TiO3 thin films with good electrical properties were prepared on Pt/Ti/SiO_2/Si (100) substrates by a modified sol-gel processing with a new precursor solution，ethylene glycol was introduced as a necessary component of the solution to increase the stability of precipitation and to decrease the crystallization temperature of films. The thermolysis process of the BST-gel was analyzed by DTA and XRD, and the effects of thickness on phase formation were investigated. A dielectric constant >400 and a dissipation factor <0.02 were measured at 100kHz for BST films heated to 700℃ for 15min in O2 with a thickness of 200nm. P-E hysteresis loop studies indicated a remanent polarization (Pr) of 1.4μC/cm2 and a coercive field (Ec)of 48kV/cm . |
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| Keywords: | BST thin films sol-gel method ethylene glycol P-E hysteresis loop |
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