亚微米投影光刻物镜MTF的简便测定方法

线性光学系统的光学传递函数可由线扩散函数的傅里叶变换求出。研究了用电荷耦合器件测量亚微米投影光刻物镜的 MTF值的系统 ,用 CCD作为光电转换器件 ,对 CCD接收到的 LSF的光强信号进行视频放大、采样 ,用数字存储示波器可方便地测得系统的 MTF值。作为测量实例 ,最后给出了测量得到的 g线、i线光刻物镜的 MTF曲线

The simplicity method of MTF test for submicron projection lithography lenses

Optical transfer function of the linear optical system can be obtained by Fourier transform of linear scattering function.The paper investigates a system which measures MTF of the submicron projection lithography lenses with CCD.By using CCD as photoelectric conversion device,light intensity signal of linear scattering function received by CCD is amplified and sampled.With numeral storage oscillograph.the MTF values of the lenses can be conveniently measured.As an example,we list the MTF curves of the g line & i line lithography lenses.