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| 盘型分子泵3D过渡流特性 | |
| 引用本文： | 巴德纯,刘波,王晓冬,杨乃恒,于治明. 盘型分子泵3D过渡流特性[J]. 真空科学与技术学报, 2004, 24(1): 11-15 |
| 作者姓名： | 巴德纯 刘波 王晓冬 杨乃恒 于治明 |
| 作者单位： | 1. 东北大学真空与流体工程研究中心,沈阳,110004 2. 东北大学真空与流体工程研究中心,沈阳,110004;沈阳工业大学工程学院,辽阳,111003 3. 沈阳航空工业学院安全工程系,沈阳,110034 |
| 基金项目： | 高等学校博士学科点专项科研项目 |
| 摘 要： | 采用直接模拟蒙特卡罗方法对过渡流态下盘型分子泵的抽气特性进行了模拟研究,并讨论了盘型分子泵通道几何参数对流动特性的影响.指出了通过改变泵的尺寸参数提高抽气系数的途径.最后,进行了实验研究和模拟研究结果的对比,证明模拟计算结果在允许的误差范围内. |
| 关 键 词： | 盘型分子泵 过渡流 抽气系数 实验 模拟 |
| 文章编号： | 1672-7126(2004)01-0011-05 |
| 修稿时间： | 2003-03-25 |
Simulation of 3D Transient Flow Characteristic of Disk-Shaped Turbo-Molecular Pump |
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| Ba Dechun ,Liu Bo ,,Wang Xiaodong ,Yang Naiheng and Yu Zhiming .Mechanical Engineering Institute of Northeastern University,Shenyang,,China, .Engineering Institute of Shenyang Institute University,Liaoyang,,China, .Security Engineering. Simulation of 3D Transient Flow Characteristic of Disk-Shaped Turbo-Molecular Pump[J]. JOurnal of Vacuum Science and Technology, 2004, 24(1): 11-15 | |
| Authors: | Ba Dechun Liu Bo Wang Xiaodong Yang Naiheng Yu Zhiming .Mechanical Engineering Institute of Northeastern University Shenyang China .Engineering Institute of Shenyang Institute University Liaoyang China .Security Engineering |
| Affiliation: | Ba Dechun *1,Liu Bo 1,2,Wang Xiaodong 1,Yang Naiheng 1 and Yu Zhiming 3 1.Mechanical Engineering Institute of Northeastern University,Shenyang,110004,China, 2.Engineering Institute of Shenyang Institute University,Liaoyang,111003,China, 3.Security Engineering Department of Shenyang Institute of Aeronautical Engineering,Shenyang,110034,China |
| Abstract: | The 3D transient flow characteristics of the disk shaped turbo molecular pump was simulated with Monte Carlo approach to evaluate the influence of its exhaust geometry on the pumping coefficient.The calculation agrees well with experimental results within acceptable error range and can be used to improve the pumping coefficient by modifying the pump geometry. |
| Keywords: | Disk Shaped Molecular Pump Transition Ranges Pumping Coefficient Experiment Simulation |
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