| 磁激活等离子体增强化学气相沉积设备的研制 |
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| 引用本文： | 劳晓东,刘欣杰,韩会民.磁激活等离子体增强化学气相沉积设备的研制[J].真空,2007,44(5):39-42. |
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| 作者姓名： | 劳晓东 刘欣杰 韩会民 |
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| 作者单位： | 1. 周口师范学院物理系,河南,周口,466001;大连理工大学材料科学与工程学院,辽宁,大连,116023
2. 大连理工大学材料科学与工程学院,辽宁,大连,116023 |
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| 摘 要： | 针对PECVD中等离子体的密度沿径向分布均匀性较差、空间气氛化学活性较差的问题,在PECVD的基础上加入电子发射源和正交电磁场以控制电子的运动,从而增强等离子场的强度和范围,使反应场的活力增加,以提高反应空间的活化能力,继而提高膜层质量.结果表明,该方法可以使等离子场的分布发生改变,使等离子体密度及范围做到可控制且可调整.
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| 关 键 词： | 磁激活等离子体增强化学气相沉积 设备 |
| 文章编号： | 1002-0322（2007）05-0039-04 |
| 修稿时间： | 2007-02-16 |
Development of magnetic-actuated PECVD system |
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| LAO Xiao-dong,LIU Xin-jie,HAN Hui-min.Development of magnetic-actuated PECVD system[J].Vacuum,2007,44(5):39-42. |
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| Authors: | LAO Xiao-dong LIU Xin-jie HAN Hui-min |
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| Affiliation: | 1. Department of Physics,Zhoukou Normal University, Zhoukou 466001,China; 2. School of Materials Science and Engineering, Dalian University of Technology, Dalian 116023, China |
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| Abstract: | The drawback of PECVD is that the density of plasma attenuated rapidly along the radial distribution and low chemical activity in its atmosphere. So it requires a more sophisticated reactor to control the plasma, A new type of PECVD system was designed and made, which is composed of electron emitter and quadrature electromagnetic field to restrict the elec tronic movement and enhance the density of plasma. The results indicated that the field of plasma is changed and the density of plasma can be controlled and adjusted. |
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| Keywords: | PECVD system magnetic actuation |
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