| 基于阳极键合的硅微圆盘多环谐振陀螺的设计与制作 |
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| 引用本文： | 朱甲强,张卫平,唐健,邢亚亮,孙殿竣,吴校生,崔峰,刘武,成宇翔,赵万良.基于阳极键合的硅微圆盘多环谐振陀螺的设计与制作[J].半导体光电,2017,38(2):199-203. |
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| 作者姓名： | 朱甲强 张卫平 唐健 邢亚亮 孙殿竣 吴校生 崔峰 刘武 成宇翔 赵万良 |
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| 作者单位： | 上海交通大学电子信息与电气工程学院微米/纳米加工技术国家级重点实验室,薄膜与微细技术教育部重点实验室,上海市北斗导航与位置服务重点实验室,上海200240;上海航天控制技术研究所惯性工程技术研究中心,上海,201109 |
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| 基金项目： | 国家自然科学基金项目(61574093)；中国航天科技创新基金项目CASC(16GFZ JJ01 309)； 教育部新世纪人才资助计划项目(NCET 10 0583)； 科学基金项目(2013ZC57003)；预研基金项目(9140A14010511JW0304)；国家重点实验室基金项目(9140C790405110C7904) |
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| 摘 要： | 提出了一种新型的基于阳极键合的硅微圆盘多环谐振陀螺的结构设计及其制作方法.该种陀螺采用MEMS工艺制作而成,基底材料为肖特BF33玻璃,电极和谐振器均由单晶硅片加工而成,肖特BF33玻璃与单晶硅片通过阳极键合工艺键合在一起.介绍了该种陀螺的基本结构、工作原理,并进行了仿真分析,得出该种陀螺具有较小的频率分裂,表现出陀螺效应.最后,通过MEMS工艺进行了实际加工,得到了该种陀螺的实验样品.
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| 关 键 词： | 阳极键合 圆盘多环谐振陀螺 MEMS工艺 |
| 收稿时间： | 2016/8/25 0:00:00 |
Design and Fabrication of Silicon Micro Disc Resonator Gyroscope Based on Anodic Bonding |
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| Abstract: | A novel type of design and fabrication of silicon micro disc resonator gyroscope based on anodic bonding was presented. This kind of gyroscope was fabricated with MEMS technology. The substrate was Schott BF33 glass, and the electrodes and the resonator were fabricated by etching a silicon wafer simultaneously. In addition, the Schott BF33 glass and the silicon wafer were bonded together with anodic bonding technology. The basic structure and working principle of the gyroscope were introduced, and then simulation analysis was conducted. It concluded that this type of gyroscope had a small frequency split and showed gyroscopic effect. At last, the silicon micro disc resonator gyroscope was fabricated with MEMS technology. |
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| Keywords: | anodic bonding disc resonator gyroscope MEMS technology |
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