| 一种新颖结构紧凑的AWG器件 |
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| 引用本文： | 江晓清,李柏阳,杨建义,王明华.一种新颖结构紧凑的AWG器件[J].半导体学报,2002,23(6). |
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| 作者姓名： | 江晓清 李柏阳 杨建义 王明华 |
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| 作者单位： | 浙江大学信息与电子工程学系,杭州,310027 |
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| 基金项目： | 国家重点基础研究发展计划(973计划)，教育部高校骨干教师资助计划 |
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| 摘 要： | 给出一种基于SOI材料结构紧凑的新颖AWG器件,它是将一个全内反射波导镜插入原波导阵列中间,并且利用全内反射时产生的相位差进行TE、TM模偏振补偿的方法,该器件具有尺寸小、制作工艺简单等特点.同时,给出一些实验结果,实验结果证实这种结构的AWG器件是可行的.
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| 关 键 词： | 列阵波导光栅(AWG) 密集波分复用(DWDM) 波导镜 偏振补偿PACC:4280L 5270G 4280S 4282 |
A Novel Compact-Structure Arrayed-Waveguide Grating Device |
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| JIANG Xiaoqing,Li Baiyang,Yang Jianyi,Wang Minghua.A Novel Compact-Structure Arrayed-Waveguide Grating Device[J].Chinese Journal of Semiconductors,2002,23(6). |
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| Authors: | JIANG Xiaoqing Li Baiyang Yang Jianyi Wang Minghua |
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| Abstract: | Arrayed-waveguide grating (AWG) device,a novel compact-structure,is presented based on silicon-on-insulator (SOI) material.A total internal reflection (TIR) waveguide mirror is fabricated at the middle of each arrayed waveguide.An approach of compensating TE-TM mode polarization is presented by using the phase difference,which is caused by TIR at the waveguide mirror.This AWG device has advantage for its small size and simple technigue of fabrication.The experimental results are given and the feasibility of fabrication is tested. |
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| Keywords: | AWG DWDM waveguide mirror polarization compensation |
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