| 激光化学汽相淀积薄膜微透镜的设计与实践 |
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| 引用本文： | 宋国瑞,姚惠贞.激光化学汽相淀积薄膜微透镜的设计与实践[J].光电子技术,1996,16(3):201-208. |
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| 作者姓名： | 宋国瑞 姚惠贞 |
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| 作者单位： | 华南理工大学电子与通信工程系!广州510641 |
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| 基金项目： | 国家自然科学基金，广东省自然科学基金 |
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| 摘 要： | 本文介绍了采用激光化学汽相淀积（ＬＣＶＤ）技术淀积氮化硅薄膜微透镜的系统与工艺的设计。实践表明，按要求建立了ＬＣＶＤ的实验装置后，只要适当控制源气体的化学配比与浓度，调节激光功率与衬底上的光斑尺寸，选择淀积时间，就可以淀积出不同直径、透明、表面光滑的氮化硅薄膜微透镜。
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| 关 键 词： | 激光 化学汽相淀积 微透镜 集成光学器件 |
Design and Practice of Film Microlenses Fabricated by Laser Chemical Vapor Deposition |
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| Song Guorui ,Yao Huizhen, Lan Zhugang.Design and Practice of Film Microlenses Fabricated by Laser Chemical Vapor Deposition[J].Optoelectronic Technology,1996,16(3):201-208. |
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| Authors: | Song Guorui Yao Huizhen Lan Zhugang |
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| Abstract: | The design of system and technology for depositing silicon-nitride film microlenses by laser chemical vapor deposition (LCVD) are introduced. The transparent siliconnitride film microlenses with smooth spherical surface and different diameter was deposited by controlling the chemical mixture ratio and concentration of source gases, adjusting the laser power and the spot size on the substrate,and selecting the deposition time appropriatelly. |
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| Keywords: | laser chemical vapor deposition microlens |
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