| 光声光谱法探测微量气体 |
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| 引用本文： | 王建业,纪新明,吴飞蝶,周嘉,黄宜平. 光声光谱法探测微量气体[J]. 传感技术学报, 2006, 19(4): 1206-1211 |
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| 作者姓名： | 王建业 纪新明 吴飞蝶 周嘉 黄宜平 |
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| 作者单位： | 复旦大学微电子系ASIC和系统国家重点实验室,上海,200433;复旦大学微电子系ASIC和系统国家重点实验室,上海,200433;复旦大学微电子系ASIC和系统国家重点实验室,上海,200433;复旦大学微电子系ASIC和系统国家重点实验室,上海,200433;复旦大学微电子系ASIC和系统国家重点实验室,上海,200433 |
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| 摘 要： | 介绍光声光谱气体传感器的发展及应用意义,根据气体光声效应讨论了光声气体传感器的工作原理,详细分析了多种不同结构传感器的原理及优缺点.重点讨论了常用一维管状光声腔体的光声理论,并给出了数学模拟模型.根据国内外的研究现状,分析了光声气体探测系统的重难点以及可能的解决方法,并讨论了光声传感向MEMS方向发展的原因及意义.
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| 关 键 词： | 光声光谱法 光声腔 气体探测 微机械技术 |
| 文章编号： | 1004-1699（2006）04-1206-06 |
| 收稿时间： | 2005-09-26 |
| 修稿时间： | 2005-09-26 |
Photoacoustic spectroscopy method for trace gas detecting |
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| WANG Jian-ye,WU Fei-die,JI Xin-min,ZHOU Ji,HUANG Yi-ping. Photoacoustic spectroscopy method for trace gas detecting[J]. Journal of Transduction Technology, 2006, 19(4): 1206-1211 |
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| Authors: | WANG Jian-ye WU Fei-die JI Xin-min ZHOU Ji HUANG Yi-ping |
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| Affiliation: | ASIC and System State Key Lab, Department of Microelectronics, Fudan University 220 Handan Road, Shanghai 200433, China |
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| Abstract: | The development and applications of photoacoustic spectroscopy gas sensors is present. The theory of the photoacoustic gas sensors and the advantages of different photoacoustic sensors are discussed. This work focuses on the one-dimension PA cell and has given the model simulation of it. Based on recent instances, the important and difficult points in the research of photoacoustic sensors are given out and some possible methods to improve them are discussed. And the conclusion is that the MEMS photoacoustic sensors have many advantages and will be the future studying trending. |
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| Keywords: | photoacoustic spectroscopy method PA cell Gas detecting MEMS techniques |
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