| 微压式液位传感器热灵敏度漂移的补偿 |
| |
| 引用本文： | 崔宏敏,鞠文斌,董加国. 微压式液位传感器热灵敏度漂移的补偿[J]. 传感器与微系统, 2004, 23(5): 51-53 |
| |
| 作者姓名： | 崔宏敏 鞠文斌 董加国 |
| |
| 作者单位： | 中国电子科技集团公司,第四十九研究所,黑龙江,哈尔滨,150001 |
| |
| 摘 要： | 介绍了微压式液位传感器的工作原理、总体结构设计及热灵敏度漂移的补偿技术与方法,给出了补偿结果,验证了补偿技术与方法的有效性和可行性,为提高硅压阻式传感器的温度稳定性与准确度提供了一种实用有效的新方法。
|
| 关 键 词： | 传感器 微压 压阻式 液位 热灵敏度漂移 |
| 文章编号： | 1000-9787(2004)05-0051-03 |
| 修稿时间： | 2004-01-30 |
Thermal sensitivity shift compensation of micropressure liquid level transducer |
| |
| CUI Hong-min,JU Wen-bin,DONG Jia-guo. Thermal sensitivity shift compensation of micropressure liquid level transducer[J]. Transducer and Microsystem Technology, 2004, 23(5): 51-53 |
| |
| Authors: | CUI Hong-min JU Wen-bin DONG Jia-guo |
| |
| Abstract: | The principle,design of structure and thermal sensitivity shift compensation technique of micropressure liquid level transducer are introduced.The compensation result is presented,and its validity and feasibility are verified.A new method to improve temperature stability and dectection accuracy of silicon piezoresistive sensor is provided. |
| |
| Keywords: | transducer micropressure piezoresistance liquid level thermal sensitivity shift |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
