Plasma enhanced-CVD of undoped and fluorine-doped Co3O4 nanosystems for novel gas sensors |
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| Authors: | Davide Barreca Daniela Bekermann Elisabetta Comini Anjana Devi Roland A Fischer Alberto Gasparotto Marco Gavagnin Chiara Maccato Cinzia Sada Giorgio Sberveglieri Eugenio Tondello[Author vitae] |
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| Affiliation: | aCNR-ISTM and INSTM, Department of Chemistry, Padova University, Via Marzolo 1, 35131 Padova, Italy;bDepartment of Chemistry, Padova University and INSTM, Via Marzolo 1, 35131 Padova, Italy;cCNR-IDASC, SENSOR Lab, Department of Chemistry and Physics, Brescia University, Via Valotti 9, 25133 Brescia, Italy;dLehrstuhl für Anorganische Chemie II, Ruhr-University Bochum, Universitätstrasse 150, 44780 Bochum, Germany;eDepartment of Physics and CNISM, Padova University, Via Marzolo 8, 35131 Padova, Italy |
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| Abstract: | Co3O4-based nanosystems were prepared on polycrystalline Al2O3 by plasma enhanced-chemical vapor deposition (PE-CVD), at temperatures ranging between 200 and 400 °C. The use of two different precursors, Co(dpm)2 (dpm = 2,2,6,6-tetramethyl-3,5-heptanedionate) and Co(hfa)2·TMEDA (hfa = 1,1,1,5,5,5-hexafluoro-2,4-pentanedionate; TMEDA = N,N,N′,N′-tetramethylethylenediamine) enabled the synthesis of undoped and fluorine-doped Co3O4 specimens, respectively. A thorough characterization of their properties was performed by glancing incidence X-ray diffraction (GIXRD), atomic force microscopy (AFM), field emission-scanning electron microscopy (FE-SEM), secondary ion mass spectrometry (SIMS) and X-ray photoelectron spectroscopy (XPS). For the first time, the gas sensing properties of such PE-CVD nanosystems were investigated in the detection of ethanol and acetone. The results show an appreciable response improvement upon doping and functional performances directly dependent on the fluorine content in the Co3O4 system. |
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| Keywords: | Co3O4 Plasma enhanced-chemical vapor deposition Fluorine doping Gas sensors |
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