Investigation of self-assembly growth and thermal stability of Au nano-particles on atomic-layer-deposited Al2O3 film |
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Authors: | HUANG Yue LIAO Zhongwei GOU Hongyan DING Shijin ZHANG Wei |
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Affiliation: | State Key Lab of ASIC & System, Fudan University, Shanghai 200433 |
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Abstract: | The self-assembly growth of Au nano-particles on atomic-layer-deposited (ALD) Al2O3 thin film has been achieved. And the self-assembly process and the thermal stability have been investigated.The results show that the ALD Al2O3 film is inclined to adsorb (3-Aminopropyl)-trimethoxysilane (APTMS), which is in favor of self-assembly growth of Au nano-particles. The resulting Au nano-particles are mainly in the range of 5–8 nm with a density of nearly 4×1011cm−2. The annealing at 300 in N2 leads to an increase in the dimension of Au nano-particles, however, the good adsorption of APTMS and the chemical compositions of Au nano-particles are maintained. When the annealing temperature elevates to 450 , Au nano-particles exhibit severe agglomeration together with extreme nonuniformilty. |
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Keywords: | metallic materials self-assembly growth Au nano-particles thermal stability |
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