Epitaxial growth of non-polar a-plane AlN films by low temperature sputtering using ZnO buffer layers期刊界 All Journals 搜尽天下杂志传播学术成果专业期刊搜索期刊信息化学术搜索

Epitaxial growth of non-polar a-plane AlN films by low temperature sputtering using ZnO buffer layers

Authors:	Hou-Guang Chen Sheng-Rui JianHui-Ling Kao Meei-Ru ChenGou-Zhi Huang

Affiliation:	^a Department of Materials Science and Engineering, I-Shou University, Kaohsiung 84001, Taiwan ^b Department of Electronic Engineering, Chung Yuan Christian University, Chung-Li 32023, Taiwan

Abstract:

Keywords:	ZnO AlN Epitaxial growth Sputtering MOCVD
本文献已被 ScienceDirect 等数据库收录！