A self-test and dynamics characterization circuit for MEMS electrostatic actuators |
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Authors: | Daniel Fernández Jordi Madrenas |
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Affiliation: | Electronic Engineering Department, Universitat Politècnica de Catalunya (UPC), Jordi Girona 1-3, 08034 Barcelona, Spain |
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Abstract: | This paper presents a high-bandwidth capacitance estimation and driving circuit especially tailored for its use with MEMS electrostatic actuators. The circuit can be integrated as a part of a system comprising an electrostatic actuator to provide self-testing and failure prediction capabilities and also as a simple and low-cost actuator dynamics characterization system capable of measuring both periodic and non-periodic movements. |
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