Spatial gas effect on the deformation behavior of embossed glass microstructures in hot embossing |
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| Affiliation: | 1. Shenzhen Key Laboratory of High-Performance Nontraditional Manufacturing, College of Mechatronics and Control Engineering, Shenzhen University, Shenzhen, 518060, Guangdong, China;2. School of Mechatronic Engineering, Harbin Institute of Technology, Harbin, 150001, Heilongjiang, China;1. Department of Chemical Engineering, University of Calcutta, 92, A. P. C. Road, Kolkata, 700009, India;2. Department of Physiology, University of Calcutta, 92, A. P. C. Road, Kolkata, 700009, India;1. Department of Physics, University of Agriculture, Faisalabad, 38040, Pakistan;2. International Iberian Nanotechnology Laboratory INL, Nanostructured Materials Group, Braga, 4715-330, Portugal;3. Department of Biochemistry, University of Agriculture, Faisalabad, 38040, Pakistan;4. LAETA, Department of Engineering Physics, University of Porto, Engineering Faculty, R. Dr. Roberto Frias, 4200-465, Porto, Portugal;5. Department of Physics, Sungkyunkwan University, South Korea;6. Department of Physics, Division of Science & Technology, University of Education, Lahore, Pakistan;1. The First Affiliated Hospital of Bengbu Medical College, Bengbu, 233000, China;2. School of Mechanical Engineering, Hefei University of Technology, Hefei, 230009, China;1. State Key Laboratory of Advanced Design and Manufacturing for Vehicle Body, Hunan University, Changsha 410082, China;2. College of Mechanical and Vehicle Engineering, Hunan University, Changsha 410082, China;3. Luoyang Zhuosheng Detection Instrument Co., Ltd., Luoyang 471003, China |
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| Abstract: | Glass hot embossing is a well-established and cost-effective manufacturing method for glass microstructures. However, the spatial volume affects deformation behaviors in closed mold cavities, which determines the final shape of the embossed glass. To investigate the spatial gas effect on the glass deformation mechanism during hot embossing, we used the focused ion beam (FIB) to fabricate blind micro-hole array structures with different depths as embossing templates. The experimental results demonstrated that the spatial volume of the mold cavity has a great influence on the energy of gas expansion, thus affecting the deformation height of glass microstructures during hot embossing. The deeper the cavity depth, the bigger the surface tension, resulting in larger surface concave deformation. Due to the surface tension of gas expansion, the deformation height of the edge zone is higher than that of the center zone at a higher embossing temperature until the heated glass is completely compressed into the mold cavity. Additionally, at lower embossing temperatures (520 °C), the heated glass has a large deformation resistance and elastic recovery. The more deformation volume escape from the shallower mold cavity because of the spatial effect, thus the deformation height decreases as the cavity depth reduces. The work provides a better understanding of manufacturing glass microstructures in hot embossing. |
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| Keywords: | Hot embossing Deformation behaviors Spatial gas effect Glass microstructures |
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