Realization of dot DFB lasers

Dot lasers with first-, second- and third-order gain coupled distributed feedback (DFB) gratings have been realized by low damage dry etching in combination with wet chemical etching and epitaxial over-growth. This technique allows above room temperature (RT) operation of dot DFB lasers with dot diameters down to 85 nm. The laser spectra show the expected emission of gain coupled DFB lasers. Threshold current densities between 1.1 kA/cm/sup 2/ and 2.6 kA/cm/sup 2/ could be obtained depending on size of the active region. An improvement in T/sub 0/ could be demonstrated comparing 0-D/1-D/2-D lasers on the same wafer. Based on the dot grating geometry improvement of the side mode suppression ratio (SMSR) was observed for broad-area dot DFB lasers.