| 浅析反渗透膜材料在半导体工厂超纯水工艺中的应用 |
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| 引用本文： | 高鹏.浅析反渗透膜材料在半导体工厂超纯水工艺中的应用[J].洁净与空调技术,2011(1):43-45. |
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| 作者姓名： | 高鹏 |
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| 作者单位： | 北京京东方显示技术有限公司 |
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| 摘 要： | 就反渗透膜材料在半导体厂超纯水工艺中的应用原理,使用条件类型,具体的项目实践进行简单介绍与说明.
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| 关 键 词： | 纯水工艺 反渗透 |
Discussion on Reverse Osmosis Membrance Applied in Ultrapure Water Production in IC Nanufacture |
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| Gao Peng.Discussion on Reverse Osmosis Membrance Applied in Ultrapure Water Production in IC Nanufacture[J].Contamination Control & Air-Conditioning Technology,2011(1):43-45. |
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| Authors: | Gao Peng |
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| Abstract: | The application principles,types of application conditions and actual project practices were explained for reverse osmosis membrance used in ultrapure water production in IC manufacture. |
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| Keywords: | Ultrapure water process Reverse osmosis |
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