纳秒脉冲触发的阵列微空心阴极放电特性

阵列微空心阴极(MHC)是一种在同一个阴极结构上加工多个微孔形成微孔阵列,实现大面积高电子密度的放电微等离子体结构。相比直流触发模式,纳秒短脉冲触发阵列微空心阴极,可以显著地减少直流触发时的电流热负荷效应,提高放电电流和放电能量。本文利用自行研制的纳秒脉冲电源,实现对阵列微空心阴极在氩气下进行脉冲放电,研究其脉冲条件下的放电特性;其次,研究其在纳秒脉冲下多孔阵列的同步放电问题,并通过加入预触发结构,有效改善其同步特性;最后,利用光纤式发射光谱仪进行氩气下氩发射光谱测量,并对纳秒放电等离子体进行光谱诊断。

The Discharge Characteristics of Array Micro-Hollow Cathode Triggered by Nanosecond Pulses

Array micro-hollow cathode (MHC),composed of multi-hollow with one cathode,is a kind of micro-plasma generator to obtain large-scale,high electron density volume of discharge plasma.Compared with DC operation mode,pulse operation mode for MHC device with ultra-short pulse duration can significantly reduce the impacts of thermal load,thus can increase the current and energy of discharge.In this paper,a pulse discharge for array MHC in Ar is achieved firstly,and its pulsed discharge characteristics are studied using the nanosecond pulse generator designed by our group.Then,its parallel operation is investigated under pulse mode,and its parallel behavior is improved by introducing a pre-trigger concept.At last,an emission spectrum measurement experiment is conducted using optical-fiber emission spectrograph,and the spectrum diagnosis for MHC discharge plasma is carried out to achieve useful plasma parameters.